Reliability of 60-nm scale CAAC-IGZO FET

H. Kimura

doi:https://doi.org/10.7567/SSDM.2018.PS-10-01

11:00 AM - 1:30 PM

[PS-10-01] Reliability of 60-nm scale CAAC-IGZO FET

^○H. Kimura¹, D. Shimada¹, N. Kamata¹, M. Motoyoshi¹, Y. Asami¹, K. Sugaya¹, R. Hodo¹, T. Murakawa¹, M. Takahashi¹, S. Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-10-01

2018 International Conference on Solid State Devices and Materials

[PS-10-01] Reliability of 60-nm scale CAAC-IGZO FET