The Japan Society of Applied Physics

11:00 AM - 1:30 PM

[PS-10-01] Reliability of 60-nm scale CAAC-IGZO FET

H. Kimura1, D. Shimada1, N. Kamata1, M. Motoyoshi1, Y. Asami1, K. Sugaya1, R. Hodo1, T. Murakawa1, M. Takahashi1, S. Yamazaki1 (1.Semiconductor Energy Laboratory Co., Ltd. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-10-01