The Japan Society of Applied Physics

11:00 AM - 1:30 PM

[PS-10-17 (Late News)] Stacked Source/Drain Electrode Structure of InGaZnO Thin-Film-Transistor for Low Contact Resistance and Suppressing Channel Shortening Effect

J. Kataoka1, N. Saito1, T. Ueda1, T. Tezuka1, T. Sawabe1, K. Ikeda1 (1.Toshiba Memory Corp. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-10-17