The Japan Society of Applied Physics

11:00 〜 13:30

[PS-4-03] Analysis of Deep Traps at Al2O3/n-GaN Interface using Photo-assisted C-V Measurement

K. Yuge1,2, T. Nabatame2, Y. Irokawa2, A. Ohi2, N. Ikeda2, A. Uedono3, L. Sang2, Y. Koide2, T. Ohishi1 (1.Shibaura Inst. of Tech. (Japan), 2.NIMS (Japan), 3.Univ. of Tsukuba (Japan))

https://doi.org/10.7567/SSDM.2018.PS-4-03