The Japan Society of Applied Physics

11:00 〜 13:30

[PS-4-14] Evaluations of Minority Carrier Lifetime in FZ-Si Affected by Si-IGBT Processes

H. Kobayashi1, R. Yokogawa1,2, K. Kinoshita1, Y. Numazawa1, A. Ogura1, S. Nishizawa3, T. Saraya4, K. Ito4, T. Takakura4, S. Suzuki4, M. Fukui4, K. Takeuchi4, T. Hiramoto4 (1.Meiji Univ. (Japan), 2.JSPS Research Fellow DC (Japan), 3.Kyushu Univ. (Japan), 4.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2018.PS-4-14