The Japan Society of Applied Physics

11:00 〜 13:30

[PS-4-21 (Late News)] InGaAs Negative Capacitance FETs Using HfZrOx: Impact of Annealing Conditions on the Ferroelectric and Steep Subthreshold Slope Characteristics

H.Q. Luc1, Y.K. Zhang1, D.Y. Jin1, H.S. Huynh1, H.M.T. Ha1, B.H. Do1, P. Huang1, W.C. Hsu1, C.Y. Lin1, E.Y. Chang1 (1.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2018.PS-4-21