The Japan Society of Applied Physics

4:45 PM - 4:46 PM

[PS-1-16] Vertical gate-all-around transistors with symmetrical silicided S/D contacts for high performance p-FET devices.

G. Larrieu1, N. Mallet1, Y. Guerfi1, F. Cristiano1, J. Pezard1, A. Lecestre1 (1.LAAS CNRS (France))