4:56 PM - 4:57 PM [PS-1-27 (Late News)] Nanosheet Number and Width Optimization of Multi Stacked NanoSheet FET for 7-nm Node SoC Application ○J.-S. Yoon1, J. Jeong1, S. Lee1, R.-H. Baek1 (1.Pohang University of Science and Technology (Korea))
