The Japan Society of Applied Physics

2018 International Conference on Solid State Devices and Materials

2018 International Conference on Solid State Devices and Materials

2018年9月9日 〜 2018年9月13日
University of Tokyo

16:33 〜 16:34

[PS-10-04] Improved Electrical Stability of Zr-IGZO Thin-Film Transistors with Zr0.85Si0.15O2 Gate Dielectric

Z.K. Zhuang1, S.J. Wang1, S.Y. Wang1, H.Y. Chen1,○C.K. Liao1, S.T. Hsiao1, B.C. You1, R.M. Ko1 (1.Univ. of Cheng Kung (Taiwan))