Performance of In2TiO5 Based Bio-sensor Treated by CF4 Plasma

C.F. Lin

2018 International Conference on Solid State Devices and Materials

2018年9月9日〜 2018年9月13日
University of Tokyo

16:37 〜 16:38

[PS-10-08] Performance of In₂TiO₅ Based Bio-sensor Treated by CF₄ Plasma

^○C.F. Lin¹, C.H. Kao^1,2, Y.W. Liu¹, C.H. Wang¹, T. Chakraborty¹, M. Das¹, C.Y. Lin² (1.Univ. of Chang Gung (Taiwan), 2.Res.of Chang Gung Memorial Hospital (Taiwan))

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2018 International Conference on Solid State Devices and Materials

[PS-10-08] Performance of In2TiO5 Based Bio-sensor Treated by CF4 Plasma

[PS-10-08] Performance of In₂TiO₅ Based Bio-sensor Treated by CF₄ Plasma