The Japan Society of Applied Physics

16:46 〜 16:47

[PS-6-17] Significant improvement of photoresponsivity of polycrystalline BaSi2 films directly formed on heated Si(111) substrates by sputtering

S. Matsuno1, R. Takabe1, S. Yokoyama1, K. Toko1, M. Mesuda2, H. Kuramochi2, T. Suemasu1 (1.Univ. of Tsukuba (Japan), 2.Tosoh Corp. (Japan))