14:15 〜 14:30

[C-1-02] Backend Engineering of Cavity-free Planar Si-nanowire Thermoelectric Generator

^○K. Oda¹, M. Tomita¹, T. Matsukawa², T. Matsuki^1,2, T. Watanabe¹ (1.Waseda Univ. (Japan), 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2019.C-1-02