The Japan Society of Applied Physics

3:00 PM - 3:15 PM

[G-1-04] Cost-Effective and BEOL-Compatible Double-Gate IGZO Recess-Channel TFT Technology Enables IoT ICs in More-than-Moore Era

Y.-A. Huang1, K.-P. Peng1, Y.-C. Meng1, P.-W. Li1, H.-C. Lin1 (1.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2019.G-1-04