3:15 PM - 3:30 PM

[G-1-05 (Late News)] Mobility of Hydrogen in Oxygen Vacancies in IGZO models with Different Crystallinities

^○T. Kanagawa¹, M. Takahashi¹, T. Nakayama¹, S. Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd. (Japan))

https://doi.org/10.7567/SSDM.2019.G-1-05