16:45 〜 17:00

[G-2-04] Two-dimensional Visualization of Temperature Distribution in Molten Region of a-Si Film during Atmospheric Pressure Thermal Plasma Jet Annealing

^○Y. Mizukawa¹, A. Kameda¹, H. Hanafusa¹, S. Higashi¹ (1.Hiroshima Univ. (Japan))

https://doi.org/10.7567/SSDM.2019.G-2-04