The Japan Society of Applied Physics

4:45 PM - 5:00 PM

[G-2-04] Two-dimensional Visualization of Temperature Distribution in Molten Region of a-Si Film during Atmospheric Pressure Thermal Plasma Jet Annealing

Y. Mizukawa1, A. Kameda1, H. Hanafusa1, S. Higashi1 (1.Hiroshima Univ. (Japan))

https://doi.org/10.7567/SSDM.2019.G-2-04