Characteristics Variations and Reliability of CAAC-IGZO FETs

S. Tezuka

doi:https://doi.org/10.7567/SSDM.2019.G-5-01

9:00 AM - 9:15 AM

[G-5-01] Characteristics Variations and Reliability of CAAC-IGZO FETs

^○S. Tezuka¹, T. Takeuchi¹, H. Sawai¹, M. Kurata¹, T. Kakehata¹, K. Ikeda¹, R. Motoyoshi¹, T. Hanada¹, E. Asano¹, T. Murakawa¹, S. Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd. (Japan))

https://doi.org/10.7567/SSDM.2019.G-5-01

2019 International Conference on Solid State Devices and Materials

[G-5-01] Characteristics Variations and Reliability of CAAC-IGZO FETs