The Japan Society of Applied Physics

4:00 PM - 4:15 PM

[N-4-02] Bottom Tier High Voltage Vevice Thermal Stability in 3D Sequential Integration for More than Moore Applications

C. Cavalcante1,2,3, G. Ghibaudo2, X. Garros1, M. Cassé1, T. Karatsori2, J. Lacord1, C. Fenouillet1, N. Rambal1, O. Rozeau1, J.P. Colinge1, M. Vinet1, D. Lattard1, F. Andrieu1, P. Batude1 (1.Lab. CEA-LETI, MINATEC (France), 2.Inst. IMEP-LAHC, Grenoble INP (France), 3.Univ. Grenoble Alpes (France))

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