The Japan Society of Applied Physics

13:00 〜 15:00

[PS-10-01] Enhanced Electrical Performance and Reliability of Ti-IGZO Thin-Film Transistors with HfxAl1-xO Gate Dielectrics

J.H. Wu1, B.C. You1, S.J. Wang1,2, R.M. Ko2, C.E. Lin1 (1.Institute of Microelectronics, Dept. of Electrical Engineering, National Cheng Kung Univ., Tainan (Taiwan), 2.College of Electrical Engineering and Computer Science, National Cheng Kung Univ., Tainan (Taiwan))

https://doi.org/10.7567/SSDM.2019.PS-10-01