10:51 〜 10:53 [PS-1-04] Systematic analysis of electron traps of HfSiON/SiO2 nMOSFETs using TSCIS ○G. Roh1, H. Kim1, Y. Kwon2, B. Kang1 (1.Pohang Univ. of Sci. and Tech. (Korea), 2.Univ. of Uiduk (Korea))
