10:51 AM - 10:53 AM

[PS-1-04] Systematic analysis of electron traps of HfSiON/SiO₂ nMOSFETs using TSCIS

^○G. Roh¹, H. Kim¹, Y. Kwon², B. Kang¹ (1.Pohang Univ. of Sci. and Tech. (Korea), 2.Univ. of Uiduk (Korea))