The Japan Society of Applied Physics

11:29 〜 11:31

[PS-1-23 (Late News)] Improved Electro-Thermal Performance in FinFETs using SOD Technology for 7nm node High Performance Logic Devices

V. Sankatali1, A. Sudarsanan1, K. Nayak1 (1.Indian Inst. of Tech. Hyderabad (India))