Evaluation of Carrier Recombination Lifetime in Silicon Epitaxial Layer by Open Circuit Voltage Decay Method

S. Sasaki

10:49 AM - 10:51 AM

[PS-4-03] Evaluation of Carrier Recombination Lifetime in Silicon Epitaxial Layer by Open Circuit Voltage Decay Method

^○S. Sasaki¹, N. Mitsugi¹, S. Samata¹, W. Manabe², M. Tsukuda², H. Y.-Kaneta², I. Omura² (1.SUMCO Corp. (Japan), 2.Kyushu Institute of Technology (Japan))

2019 International Conference on Solid State Devices and Materials

[PS-4-03] Evaluation of Carrier Recombination Lifetime in Silicon Epitaxial Layer by Open Circuit Voltage Decay Method