11:19 〜 11:21 [PS-9-18 (Late News)] Efficient Heat Transfer by Through Silicon Via in 3D Packaging for Practical-scale Quantum Annealing Machine ○W. Feng1, K. Kikuchi1, M. Hidaka1, H. Yamamori1, Y. Araga1, K. Makise1, S. Kawabata1 (1.AIST (Japan))