The Japan Society of Applied Physics

2:30 PM - 2:45 PM

[C-9-02] A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer

〇Takashi - Ichikawa1, Kohei Shibata1, Tatsuya Koga1, Katsuyuki Machida1, Shinichi Iida2, Noboru Ishihara1, Kazuya Masu1, Hiroyuki Ito1 (1. Tokyo Tech.(Japan), 2. Corp. NTT Advanced Technology(Japan))

https://doi.org/10.7567/SSDM.2020.C-9-02