A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer

Takashi - Ichikawa

doi:https://doi.org/10.7567/SSDM.2020.C-9-02

14:30 〜 14:45

[C-9-02] A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer

〇Takashi - Ichikawa¹, Kohei Shibata¹, Tatsuya Koga¹, Katsuyuki Machida¹, Shinichi Iida², Noboru Ishihara¹, Kazuya Masu¹, Hiroyuki Ito¹ (1. Tokyo Tech.(Japan), 2. Corp. NTT Advanced Technology(Japan))

https://doi.org/10.7567/SSDM.2020.C-9-02

2020 International Conference on Solid State Devices and Materials

[C-9-02] A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer