[A-7-07] Low-Temperature Fabrication of Ge MOS Capacitor with Wet Oxidized Yttrium Interlayer

〇Keisuke Yamamoto¹, Kento Iseri¹, Dong Wang¹, Hiroshi Nakashima¹ (1.Kyushu Univ.)

2021 International Conference on Solid State Devices and Materials |Thu. Sep 9, 2021 10:05 AM - 10:12 AM |PDF Download

[A-8-01] Computing-in-Memory Demonstration of Multiple-State (>8) Analog Memory Cell with Ultra-Low (<1 nA/cell) Current Enabled by Monolithic CAAC-IGZO FET + Si CMOS FET Stack for Highly-Efficient AI Applications

〇Satoru Ohshita¹, Hidefumi Rikimaru¹, Kazuki Tsuda¹, Hiromichi Godo¹, Yoshiyuki Kurokawa¹, Yoshinori Ando¹, Hiromi Sawai¹, Yasumasa Yamane¹, Shunpei Yamazaki¹, Toru Nakura², Hiroshi Yoshida³, Kuo-Chang Huang³, Miller Liao⁴, Shou-Zen Chang³ (1.Semiconductor Energy Laboratory Co., Ltd., 2.Fukuoka Univ., 3.Powerchip Semiconductor Manufacturing Corp., 4.National Taiwan Univ.)

2021 International Conference on Solid State Devices and Materials |Thu. Sep 9, 2021 10:45 AM - 10:52 AM |PDF Download

[A-8-02] High-Performance Amorphous InGaZnO FET as a Key Enabler for Low Thermal Budget (350^OC) BEOL Monolithic 3-D Integration

〇CHUNKUEI CHEN¹, Umesh Chand¹, Xinghua Wang¹, Zihang Fang¹, Sonu Hooda¹, Shih-Hao Tsai¹, Aaron Voon Yew Thean¹ (1.National Univ. of Singapore)

2021 International Conference on Solid State Devices and Materials |Thu. Sep 9, 2021 10:52 AM - 10:59 AM |PDF Download

[A-8-03] Statistical Analysis on Threshold Voltage Variability of CAAC-IGZO FETs Using Large-Scale Array TEG

Yuki - Ito¹, 〇Toshiki - Hamada¹, Yoshinori - Ando¹, Masahiro - Takahashi¹, Tsutomu - Murakawa¹, Hitoshi - Kunitake¹, Masaharu - Kobayashi², Kuo Chang Huang³, Hiroshi - Yoshida³, Miller - Liao⁴, Shou Zen Chang³, Shunpei - Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd., 2.d.lab, School of Engineering, the University of Tokyo, 3.Powerchip Semiconductor Manufacturing Corporation, 4.National Taiwan University)

2021 International Conference on Solid State Devices and Materials |Thu. Sep 9, 2021 10:59 AM - 11:06 AM |PDF Download

[A-8-04] Simulation Study on Memory Characteristics of IGZO-Channel FeFET from 2D Planer to 3D Vertical Structure for Channel Structure Engineering

Fei Mo¹, Xiaoran Mei¹, Takuya Saraya¹, Toshiro Hiramoto¹, 〇Masaharu Kobayashi¹ (1.Univ. of Tokyo)

2021 International Conference on Solid State Devices and Materials |Thu. Sep 9, 2021 11:06 AM - 11:13 AM |PDF Download

[A-8-05] Withdrawn

2021 International Conference on Solid State Devices and Materials

[B-2-01 (Invited)] Co-integration of ReRAM with OTS back-end selector for high density Crosspoint arrays

〇Gabriel Molas¹, Joel Minguet Lopez¹, Laurent Grenouillet¹, Catherine Carabasse¹, Lucas Reganaz¹, Gabriele Navarro¹, Chiara Sabbione¹, Mathieu Bernard¹, Niccolo Castellani¹, Damien Deleruyelle³, Marc Bocquet², Jean-Michel Portal², Nazim Ait Abdelkader ⁴, Quentin Rafhay⁴, François Andrieu¹ (1.CEA-Leti, 2.IM2NP CNRS, France, 3.INL CNRS, France , 4.IMEP LAHC CNRS, France)

2021 International Conference on Solid State Devices and Materials |Tue. Sep 7, 2021 3:45 PM - 4:15 PM |PDF Download

[B-2-02] Operation Optimization of Logic Compatible 2T RRAM Array by High-κ Metal Gate CMOS Logic Technologies

〇Yao-Hung Huang¹, Chrong-Jung Lin¹, Ya-Chin King¹ (1.National Tsing Hua Univ.)

2021 International Conference on Solid State Devices and Materials |Tue. Sep 7, 2021 4:15 PM - 4:22 PM |PDF Download

[B-2-03] Unipolar Switching based Antiferroelectric HfZrO₂ Diode beyond Endurance > 10¹¹ Cycles with Low Operation Voltage for FeRAM Application

〇Kuo-Yu Hsiang^1,2, C.-Y. Liao¹, Y.-Y. Lin¹, J.-H. Liu¹, S.-H. Chang¹, F.-C. Hsieh¹, S.-H. Chiang¹, H. Liang¹, C.-Y. Lin¹, Z.-F. Lou¹, T.-C. Chen³, C.-S. Chang³, M. H. Lee¹ (1.National Taiwan Normal University, 2.National Yang Ming Chiao Tung University, 3.Taiwan Semiconductor Manufacturing Company)

2021 International Conference on Solid State Devices and Materials |Tue. Sep 7, 2021 4:22 PM - 4:29 PM |PDF Download

[B-2-04] FinFET-based P-channel Logic Compatible Differential Floating Gate Memory Cells by Cross-coupled Structure

〇Wei-cheng Zhuang¹, Wei-hwa Lin¹, Ya-chin King¹, Chrong-jung Lin¹ (1.National Tsing Hua Univ.)

2021 International Conference on Solid State Devices and Materials |Tue. Sep 7, 2021 4:29 PM - 4:36 PM |PDF Download