[19a-PA2-1~26] 3.9 Terahertz technologies

[19a-PA2-2] Profile control of one-dimensional Terahertz moth-eye structure fabricated by
femtosecond laser processing

Xi Yu¹, 〇(D)Yoshiki Tanaka¹, Kazuhisa Mikame², Nobuhito Takizawa², Fumihiro Itoigawa¹, Shingo Ono¹ (1.NITech, 2.Tamari Industry Co., LTD.)

Keywords:terahertz, antireflective structure, laser processing