Directed Self Assembly (DSA)

[1A301-05] Directed Self Assembly (DSA)

2022年6月28日(火) 14:00 〜 16:00 Directed Self Assembly (DSA) (A3)

Chairman:Seiji Nagahara(Tokyo Electron Ltd.), Teruaki Hayakawa(Tokyo Institute of Technology)

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14:00 〜 14:40

[1A301] DSA and Patterning Ecosystem Enablement [Keynote Lecture]

*Chandra Sarma¹ (1. Intel Corp)

14:40 〜 15:00

[1A302] Precise Introduction of Discrete Oligopeptide at Junction of PS-PMMA Block Copolymer toward Phase Separation with Lower Molecular Weight [invited]

*Makoto Ouchi¹ (1. Kyoto University)

15:00 〜 15:20

[1A303] Rectification of Extreme Ultraviolet Lithography Patterns using Directed Self-Assembly of Block Copolymers: a Study on Hexagonal Contact Hole Arrays [invited]

*Lander Verstraete¹, Hyo Seon Suh¹, Julie Van Bel¹, Philippe Bezard¹, Waikin Li¹, Purnota Hannan Timi¹, Nadia Vandenbroeck¹, Roberto Fallica¹, Andreia Santos², Shinji Miyazaki³, Boaz Alperson⁴, YoungJun Her⁵, Carmen Popescu⁶, Alexandra McClelland⁶, Alex Robinson⁶ (1. imec, Kapeldreef 75, 3001 Leuven, Belgium, 2. SCREEN SPE Germany, Fraunhoferstrasse 7, D-85737 Ismaning, Germany, 3. Merck electronics LTD, 3330 Chihama, Kakegawa-shi, Shizuoka 437-1412, Japan, 4. EMD performance materials Corp. 70 Meister Avenue Somerville, new Jersey 08876, USA, 5. Merck Chemicals NV, 75 Kapeldreef, Heverlee 3001, Belgium, 6. Irresistible Materials, Birmingham Research Park, Birmingham, UK)

15:20 〜 15:40

[1A304] Effect of Modified Chemical Junction of a Diblock Copolymer on the Microphase Separation Behavior

*Yoshihiro Agata¹, Yuta Nabae¹, Toshiaki Ougizawa¹, Teruaki Hayakawa¹ (1. Department of Materials Science and Engineering, School of Materials and Chemical Technology, Tokyo Institute of Technology)

15:40 〜 16:00

[1A305] Substituent effect on self-assembly and the resulting fluorescence efficiency

Mina Han¹, *Pyae Thu¹ (1. Kongju National University)