10:40 AM - 11:00 AM
*Michael J Eller1, Jander Cruz1, Dmitriy S Verkhoturov2, Stanislav V. Verkhoturov2, Emile A Schweikert2 (1. California State University Northridge, 2. Texas A&M University)
EUV Lithography
Wed. Jun 29, 2022 10:40 AM - 12:00 PM EUV Lithography (A5)
Chairman:Taku Hirayama(HOYA Corp.), Hiroaki Oizumi(GIGAPHOTON Inc.)
10:40 AM - 11:00 AM
*Michael J Eller1, Jander Cruz1, Dmitriy S Verkhoturov2, Stanislav V. Verkhoturov2, Emile A Schweikert2 (1. California State University Northridge, 2. Texas A&M University)
11:00 AM - 11:30 AM
*Toru Fujimori1 (1. FUJIFILM Corporation)
11:30 AM - 12:00 PM
Hiroto Kudo1, *Yutaro Iwashige1, Kazumasa Okamoto2, Takahiro Kozawa2 (1. Kansai Univ., 2. Osaka Univ.)