The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

EUV Lithography

[2A505-07] EUV Lithography II

2022年6月29日(水) 10:40 〜 12:00 EUV Lithography (A5)

Chairman:Taku Hirayama(HOYA Corp.), Hiroaki Oizumi(GIGAPHOTON Inc.)

11:00 〜 11:30

[2A506] Recent status of the stochastic issues of photoresist materials in EUV lithography [Invited]

*Toru Fujimori1 (1. FUJIFILM Corporation)