Schedule 17 11:30 AM - 12:00 PM [2A507] Synthesis and resist sensitive property of iodine-containing materials using extreme ultraviolet (EUV) exposure tool [Invited] Hiroto Kudo1, *Yutaro Iwashige1, Kazumasa Okamoto2, Takahiro Kozawa2 (1. Kansai Univ., 2. Osaka Univ.)