The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

EUV Lithography

[2A514-15] EUV Lithography IV

2022年6月29日(水) 16:00 〜 16:55 EUV Lithography (A5)

Chairman:Takeo Watanabe(University of Hyogo), Taku Hirayama(HOYA Corp.)

16:00 〜 16:45

[2A514] [Keynote Lecture] Patterning readiness towards High NA EUV lithography

*Danilo De Simone1 (1. IMEC, Belgium)