The 39th International Conference of Photopolymer Science and Technology

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Computational / Analytical Approach for Lithography Processes

[A4] Computational / Analytical Approach for Lithography processes

Thu. Jun 30, 2022 9:00 AM - 11:30 AM Computational / Analytical Approach for Lithography Processes (A4)

Chairman:Tomoki Nagai(JSR Corporation), Takahiro Kozawa(Osaka University)

10:00 AM - 10:30 AM

[3A403] Atomistic Dynamics and Mechanism of SiO2 Plasma Etching Processes: Tight-Binding Quantum Chemical Molecular Dynamics Simulations [invited]

*Momoji Kubo1 (1. Institute for Materials Research, Tohoku University)