2:15 PM - 2:30 PM
▲ [19p-B4-4] Comparison of crystalline quality of SPC Si films grown on YSZ layers with that on glass substrates in pulse laser annealing
Keywords:silicon,laser,crystallization
Presentation information
Oral presentation
13. Semiconductors A (Silicon) » 13.5 Si process technology
[19p-B4-1~21] 13.5 Si process technology
Thu. Sep 19, 2013 1:30 PM - 7:00 PM B4 (TC2 1F-106)