[20a-A8-1~12] 5.3 Optical Control

[20a-A8-8] Si Taper-SSC with Large Fabrication Tolerance due to Optical Mode Control by using SiOx Thin Film Slab Waveguide

^○Hiroyuki Takahashi^1,2, Nobuaki Hatori^1,2, Takanori Shimizu^1,2, Masashige Ishizaka^1,2, Makoto Okano^1,3, Tsuyoshi Horikawa^1,3 (PECST¹, PETRA², AIST³)

Keywords:スポットサイズ変換器,SiOx,トレランス