[28p-A6-1~8] 6.2 Carbon-based thin films

[28p-A6-3] △DC electrical conductivity characterization of amorphous carbon nitride thin films prepared by reactive sputtering

^○Naoyuki Tamura¹, Masami Aono¹, Tomo Harata¹, Nobuaki Kitazawa¹, Yoshihisa Watanabe¹ (NDA¹)

Keywords:アモルファス窒化炭素薄膜、化学結合状態、電気特性