[29a-B8-1~10] 8.2 Plasma measurements and diagnostics

[29a-B8-5] Density of the electronic exited states of Ti in the sputtering plasma and the crystal structure deposited on the glass plates.

^○Kenta Watanabe¹, Tomonori Yamaguchi¹, Yoji Yasuda¹, Nobuo Nishimiya¹, Masao Suzuki¹ (Tokyo Polytechnic Univ.¹)

Keywords:スパッタプラズマ、Ti、結晶構造