[29a-B8-1~10] 8.2 Plasma measurements and diagnostics

[29a-B8-4] Gas Temperature Measurement of ICP Assisted DC Magnetron Discharge by Tunable Diode Laser Absorption Spectroscopy (Ⅱ)

^○Yoshinobu Matsuda¹, Takuhiro Hashimoto¹, Shunsuke Akiba¹, Shintaro Wakiyama¹, Masanori Shinohara¹ (Nagasaki Univ.¹)

Keywords:気体温度、誘導結合プラズマ、スパッタリング