[29a-B8-1~10] 8.2 Plasma measurements and diagnostics

[29a-B8-3] LIF Observation of the Etching Products in the Inward-Plasma

^○Jun Miyawaki¹, Atsushi Ando¹, Toshitaka Kubo¹, Tomoyuki Horie¹, Miyuki Tanaka¹, Satoshi Takahashi², Yuya Shirayama², Shuntaro Yokosuka², Chikatsu Iwase², Tomohisa Sugo², Akihiro Hayashi², Kenta Kashimura², Shun'ichiro Shimbori², Hiroshi Tokumoto², Tetsuo Shimizu¹ (AIST¹, Sanyu Co., Ltd.²)

Keywords:plasma、etching、laser