[19a-A17-1~12] 13.2 絶縁膜技術

▲ [19a-A17-12] Improvement of S-factor method for evaluation of MOS interface state density

^○（D）蔡偉立^1,2，竹中充^1,2，高木信一^1,2 (東大院工¹，JST-CREST²)

キーワード：S factor method, interface state density