The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si-English Session

[20a-F10-1~13] 13.5 Si-English Session

Thu. Mar 20, 2014 9:00 AM - 12:30 PM F10 (F406)

10:00 AM - 10:15 AM

[20a-F10-5] Electrical activation and crystallinity recovery of P-implanted Ge

Toshimitsu Nakamura1,2, Tomonori Nishimura1,2, Kosuke Nagashio1,2, Akira Toriumi1,2 (Univ. of Tokyo1, JST-CREST2)

Keywords:ゲルマニウム,implantation,phosphorus