[20a-F10-1~13] 13.5 Si-English Session

▼ [20a-F10-8] Reinvestigation of the role of Ar in structural phase transformation of sputtered HfO₂

^○岩井貴雅，矢嶋赳彬，西村知紀，長汐晃輔，鳥海明 (東大院工)

キーワード：HfO2,スパッタ,Ar