3:45 PM - 4:15 PM
[14p-4C-5] Interface Engineering and Development of Gate Insulators for SiC Power MOS Devices
Keywords:semiconductor,gate insulator,power device
Presentation information
Symposium
Symposium » Dielectric Thin Film Technology Beyond Borders: From Si to Non-Si
[14p-4C-1~6] Dielectric Thin Film Technology Beyond Borders: From Si to Non-Si
Mon. Sep 14, 2015 1:30 PM - 4:45 PM 4C (432)
座長:小山 正人(東芝),渡邉 孝信(早大)