[15p-1C-1~18] 13.5 Semiconductor devices and related technologies

[15p-1C-3] Dependence of Soft Errors in SOI-SRAM on Distribution of Energy Deposition by High-Energy Heavy-Ion Incidence

〇Satoshi Abo¹, Masatoshi Hazama¹, Fujio Wakaya¹, Shinobu Onoda^1,2, Takahiro Makino², Takeshi Ohshima², Hidekazu Oda³, Mikio Takai¹ (1.Osaka Univ., 2.JAEA, 3.Renesas Electronics)

Keywords:soft error,SOI-SRAM,reliability