[22a-P5-1~18] 6.4 Thin films and New materials

[22a-P5-13] Fabrication of IGZO Thin Films by RF Sputtering and their TFT Applications

〇(B)Takanori Takahashi¹, Keisuke Kadowaki¹, Tomoya Sato¹, Takaaki Inoue¹, Yoshiro Kumagai¹, Takeshi Hoga¹, Kiyoshi Uchiyama¹ (1.NIT, Tsuruoka College)

Keywords:thin film transisitor