14:15 〜 14:30
▲ [20p-438-3] Atomic-layer etching (ALE) of magnetic films by Hexafluoroacetylacetone (HFAC) molecules
〇(D)Abdulrahman Hikmat Basher1、Michiro Isobe1、Tomoko Ito1、Masato Kiuchi2、Take Takeuchi3、Kazuhiro Karahashi1、Ikutaro Hamada1、Yoshitada Morikawa1、Satoshi Hamaguchi1 (1.Osaka Univ.、2.AIST、3.Nara Womens Univ.)