13:30 〜 15:30
▼ [17p-P7-4] Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever For MEMS Accelerometers
〇Ken Hashigata1、Haochun Tang1、Chun-Yi Chen1、Tso-Fu Mark Chang1、Daisuke Yamane1、Katsuyuki Machida1,2、Kazuya Masu1、Masato Sone1 (1.Tokyo Tech、2.NTT AT Corp.)