Ken Hashigata

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:30 PM - 3:30 PM P7 (P)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-P7-1~21] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

▼ [17p-P7-4] Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever For MEMS Accelerometers

〇Ken Hashigata¹, Haochun Tang¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Daisuke Yamane¹, Katsuyuki Machida^1,2, Kazuya Masu¹, Masato Sone¹ (1.Tokyo Tech, 2.NTT AT Corp.)

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