The 65h JSAP Spring Meeting, 2018

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Symposium (Oral)

Symposium » Ion Beam and Surface Analysis: Recent Progress in Secondary Ion Mass Spectrometry (SIMS) and Its Application to Organic Analysis

[18p-C201-1~7] Ion Beam and Surface Analysis: Recent Progress in Secondary Ion Mass Spectrometry (SIMS) and Its Application to Organic Analysis

Sun. Mar 18, 2018 1:45 PM - 5:30 PM C201 (52-201)

Ken Nakamura(AIST), Yasuhito Gotoh(Kyoto Univ.)

1:45 PM - 2:15 PM

[18p-C201-1] Innovative Technologies in Advanced SIMS:
From Novel Ion beam to Latest Mass Analysis Technique

〇Jiro Matsuo1 (1.Kyoto Univ.)

Keywords:Secondary Ion Mass Spectrometry, Organic Molecules, Mass Imaging

SIMS (Secondary Ion Mass Spectrometry) technique is now widely used for material analysis of semiconductors, organic molecules and bio-molecules. In this paper, we would like to introduce novel ion beams and latest mass analysis techniques used in advanced SIMS system and discuss about a grand challenging subjects.